The core advantage of this product is its fully automatic detection capability and ultra-high measurement accuracy, which can meet the strict quality inspection requirements of the semiconductor industry. The granite and stainless steel host has good stability and is not easy to deform, ensuring long-term measurement accuracy. It supports the detection of 200mm and 300mm wafers, and the built-in wafer level metrology analysis software can automatically count the number of defective wafers and generate professional quality reports. The industrial Ethernet interface can be connected to the semiconductor production line control system to realize closed-loop control of production.
The main machine dimensions are 2500mm × 2000mm × 1800mm, with a net weight of 1200kg, which is suitable for fixed installation in the semiconductor clean workshop. It supports the detection of 200mm and 300mm wafers, and the measurement accuracy reaches ±0.05μm, meeting the strict quality inspection requirements of the semiconductor industry. The scanning speed is up to 20mm/s, and the fully automatic operation mode can realize unattended detection. It is powered by AC 380V 50/60Hz, and is compatible with major semiconductor production equipment control systems through industrial Ethernet interfaces. The built-in analysis software can generate professional wafer quality inspection reports and conduct data comparison with the design drawings.
This product is mainly used in wafer manufacturing plants, microelectronic component production workshops, semiconductor packaging and testing plants and other scenarios. It can conduct fully automatic detection of the contour, flatness, step height and other parameters of semiconductor wafers, replace manual detection work, improve detection efficiency and accuracy, and ensure that the delivered semiconductor products meet the design requirements. It can also be used for quality inspection of microelectronic components such as chips and circuit boards.
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