Nanoscale High-precision Profilometer

Product features:

The core advantage lies in the active vibration isolation system that offsets the environmental vibration impact of the laboratory, paired with a 0.5μm radius diamond probe and 0.001μm vertical resolution to achieve nanoscale precision profile measurement. It uses a granite base and aluminum alloy frame to ensure structural stability, and is equipped with professional 3D metrology software to support 3D topography reconstruction and detailed geometric tolerance analysis. It supports IEEE1394 and USB3.1 high-speed data transmission, solving the industry pain points of accurate measurement of nanoscale workpieces, and fully meets the ISO 10110 international optical inspection standards to meet the needs of high-end scientific research and military-grade inspection.

Product specifications:

Detailed parameters: net weight 25kg, overall size 600mm×500mm×350mm; granite base ensures structural stability, active vibration isolation system eliminates environmental vibration interference within ±5μm; X/Y axis measurement stroke 50mm×50mm, Z axis stroke 20mm; measurement accuracy reaches ±0.005μm, vertical resolution 0.001μm; using R=0.5μm natural diamond test probe, supports nanoscale roughness, profile and step height detection; equipped with IEEE1394 and USB3.1 high-speed data interfaces, transmission speed up to 10Gbps; equipped with professional 3D metrology software, supports 3D topography visualization, GD&T geometric tolerance analysis and data comparison report generation; working environment requires temperature 20±0.5℃, relative humidity 30%-60% RH, need to use with stabilized power supply.

Product application:

Applicable to MEMS device 3D profile inspection, semiconductor lithography mask accuracy verification, nano-coating thickness measurement, optical lens nanoscale roughness inspection, military precision parts geometric tolerance inspection, university nanotechnology research experiments and other scenarios. As a laboratory-level high-precision inspection equipment, it provides accurate nanoscale measurement data for high-end manufacturing and research fields, helping enterprises control the production quality of top precision products and promote the research and development and optimization of nanoscale manufacturing processes.