The core strength of this capacitive micro-displacement sensor is its ultra-high resolution of 0.0001mm (0.1μm) and measurement accuracy of ±0.001mm, making it capable of detecting nanoscale displacement changes that are invisible to the naked eye. Unlike laser sensors that require strict surface reflectivity, it works reliably on most conductive and non-conductive surfaces, including glass, silicon wafers, and polymer materials, eliminating measurement limitations caused by surface properties. It uses a closed-loop capacitive detection system, which minimizes thermal drift and mechanical vibration interference, ensuring stable output in laboratory and clean room environments. Equipped with USB and 0-2V output signals, it supports direct connection to computers for data logging and analysis, as well as integration with precision control systems. The alumina ceramic housing has excellent thermal stability, with a thermal expansion coefficient of only 7.2×10^-6/℃, ensuring measurement accuracy is not affected by temperature fluctuations.
This capacitive micro-displacement sensor has a measurement range of 0-10mm, targeted at ultra-fine position detection in research and high-tech manufacturing. Its measurement accuracy is ±0.001mm, with an resolution of 0.0001mm, enabling nanoscale displacement monitoring. It supports two output signals: USB digital signal for direct connection to computers and data acquisition systems, and 0-2V analog signal for integration with precision control systems. It operates on a low supply voltage of 5VDC, which can be powered by a USB port, eliminating the need for additional power supplies. The response time is as low as 0.2ms, enabling real-time monitoring of fast micro-movements such as MEMS device testing. Housed in a high-purity alumina ceramic enclosure, it offers excellent thermal stability and corrosion resistance. The protection grade is IP64, preventing dust ingress and splashing water damage. The working temperature range is 0℃ to +40℃, suitable for laboratory and clean room environments. The sensor’s overall dimensions are 40mm×30mm×20mm, with a net weight of 120g, and it comes with a fine-adjustment bracket for precise positioning during installation.
This ultra-precision capacitive micro-displacement sensor is primarily used in scientific research and high-tech manufacturing requiring nanoscale measurement accuracy. In semiconductor manufacturing, it is used for silicon wafer flatness detection, photolithography machine stage positioning, and chip packaging alignment, ensuring the precision of microelectronic components. In optical equipment, it calibrates lens positions, mirror tilt angles, and laser beam alignment in telescopes, microscopes, and laser processing systems, optimizing optical performance. In scientific research, it is used in material science experiments to measure thermal expansion coefficients, in physics research to monitor tiny mechanical vibrations, and in biomechanics to study cell deformation under stress. Additionally, it is suitable for MEMS device testing, precision gyroscope calibration, and aerospace component vibration analysis, where ultra-high precision and stable performance are critical to research and product quality.
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